Ahmad, Khairol Amali and Abd Ghani, Nabilah Fathiah and Mohamad Shahimin, Mukhzeer (2021) Optimising ESD countermeasures in 12nm gate oxide semiconductor manufacturing: a robust engineering approach. In: The 3rd International Conference on Applied Photonics and Electronics (InCAPE 2021, 6-7 Oktober 2021, via virtual conference. (Submitted)
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Abstract
Equipment inefficiency and ineffectiveness affect output performance/quality of production. Case study of this work 12 nm Gate Oxide Semiconductor Manufacturing, focusing at the back end process of IC fabrication.
| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Uncontrolled Keywords: | robust engineering,ESD, hypothesis |
| Subjects: | T Technology > TA Engineering (General). Civil engineering (General) T Technology > TJ Mechanical engineering and machinery |
| Divisions: | Faculty of Engineering |
| Depositing User: | Mr Shahrim Daud |
| Date Deposited: | 03 Apr 2023 04:14 |
| Last Modified: | 03 Apr 2023 04:14 |
| URI: | http://ir.upnm.edu.my/id/eprint/188 |
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